SBIR Phase I: Compression Bonded Hermetic Packaging

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: 0512857
Agency Tracking Number: 0512857
Amount: $99,850.00
Phase: Phase I
Program: SBIR
Awards Year: 2005
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
2020 Centimeter Circle, Austin, TX, 78758
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Nate Potter
 (512) 997-7781
Business Contact
 Mark Eaton
Title: Mr
Phone: (412) 997-7781
Research Institution
This Small Business Innovation Research Phase I project aims to develop a compression bonding technology in two versions -- cold flow seals and cold welding -- for room-temperature, hermetic packaging of MEMS. This project addresses key needs in the MEMS industry, where the lack of versatile, low-cost hermetic packaging techniques is holding back the development of many new MEMS types. Room temperature packaging is vital to improving the production yields of many MEMS, especially optical MEMS (MEOMS). Project will test the low and medium yield strength materials combinations that could be used in the two approaches (mentioned above) and to demonstrate the concept in small packages. The broader impacts from this technology could result in a significant increase to the knowledge base of welding and joining processes, especially as they apply on the micro-scale. The U.S. currently leads in MEMS technology and this project could help maintain that lead.

* Information listed above is at the time of submission. *

Agency Micro-sites

SBA logo
Department of Agriculture logo
Department of Commerce logo
Department of Defense logo
Department of Education logo
Department of Energy logo
Department of Health and Human Services logo
Department of Homeland Security logo
Department of Transportation logo
Environmental Protection Agency logo
National Aeronautics and Space Administration logo
National Science Foundation logo
US Flag An Official Website of the United States Government