SBIR Phase II: Highly Efficient Exhaust Cleanup Technology for Environmentally Benign Processing

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: 0548440
Agency Tracking Number: 0419257
Amount: $500,000.00
Phase: Phase II
Program: SBIR
Awards Year: 2006
Solicitation Year: 2003
Solicitation Topic Code: AM
Solicitation Number: NSF 03-535
Small Business Information
1619 Garnet Street, Broomfield, CO, 80020
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Ofer Sneh
 (303) 466-2341
Business Contact
 Ofer Sneh
Title: Dr
Phone: (720) 887-8166
Research Institution
This Small Business Innovation Research (SBIR) Phase II project will develop a novel, integrated reactive abatement model (IRAM) that effectively removes solidifying chemicals from the exhaust effluent of atomic layer deposition (ALD) manufacturing processes. ALD and related manufacturing technologies are widely used in the electronics industry and will be critical for emerging nanotechnology applications. However, a key issue is the emission of reactive, toxic and solidfying chemicals that clog and destroy equipment, requiring frequent cleanup and replacement, and create worker safety and environmental concerns. Objectives of this project include developing suitable abatement chemistries and systems for several important generic ALD processes and deriving generalized IRAM methodology that can be used to produce a module that can be integrated into ALD equipment.

* Information listed above is at the time of submission. *

Agency Micro-sites

SBA logo
Department of Agriculture logo
Department of Commerce logo
Department of Defense logo
Department of Education logo
Department of Energy logo
Department of Health and Human Services logo
Department of Homeland Security logo
Department of Transportation logo
Environmental Protection Agency logo
National Aeronautics and Space Administration logo
National Science Foundation logo
US Flag An Official Website of the United States Government