SBIR Phase II: Highly Efficient Exhaust Cleanup Technology for Environmentally Benign Processing

Award Information
Agency:
National Science Foundation
Branch
n/a
Amount:
$500,000.00
Award Year:
2006
Program:
SBIR
Phase:
Phase II
Contract:
0548440
Award Id:
67989
Agency Tracking Number:
0419257
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
1619 Garnet Street, Broomfield, CO, 80020
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
OferSneh
Dr
(303) 466-2341
ofer@sundewtech.com
Business Contact:
OferSneh
Dr
(720) 887-8166
ofer@sundewtech.com
Research Institute:
n/a
Abstract
This Small Business Innovation Research (SBIR) Phase II project will develop a novel, integrated reactive abatement model (IRAM) that effectively removes solidifying chemicals from the exhaust effluent of atomic layer deposition (ALD) manufacturing processes. ALD and related manufacturing technologies are widely used in the electronics industry and will be critical for emerging nanotechnology applications. However, a key issue is the emission of reactive, toxic and solidfying chemicals that clog and destroy equipment, requiring frequent cleanup and replacement, and create worker safety and environmental concerns. Objectives of this project include developing suitable abatement chemistries and systems for several important generic ALD processes and deriving generalized IRAM methodology that can be used to produce a module that can be integrated into ALD equipment.

* information listed above is at the time of submission.

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