PRECISE FLUX CONTROL FOR LATTICE MATCHED SUPERLATTICE MATERIALS

Award Information
Agency: Department of Defense
Branch: Air Force
Contract: N/A
Agency Tracking Number: 17826
Amount: $49,646.00
Phase: Phase I
Program: SBIR
Awards Year: 1992
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
Superior Vacuum Technology,
7388 Washington Ave., Eden Prairie, MN, 55344
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Dr. Peter P. Chow
 (612) 941-1898
Business Contact
Phone: () -
Research Institution
N/A
Abstract
AN EFFECTIVE METHOD FOR REDUCING FLUX TRANSIENTS IN MOLECULAR BEAM EPITAXY (MBE) EFFUSION CELL SOURCE IS PROPOSED. MBE IS A USEFUL TECHNIQUE FOR FABRICATING MANY IMPORTANT ELECTRONIC AND OPTOELECTRONIC DEVICES WHOSE PERFORMANCE DEPENDS CRITICALLY ON REPRODUCIBLE MATERIAL STRUCTURES. TIGHT CONTROL OF THE STRUCTURES IS OFTEN HINDERED BY FLUX TRANSIENTS DURING SOURCE SHUTTER OPERATION. WE PROPOSE A METHOD TO ELIMINATE THESE TRANSIENTS SO STABLE FLUX CAN BE ACHIEVED THROUGHOUT THE GROWTH PROCESS. THE TECHNIQUE INCORPORATES FEATURES IN THE SOURCE CELL-SHUTTER ASSEMBLY DESIGN THAT MINIMIZES THERMAL TRANSIENTS AND USES PROGRAMMED TEMPERATURE RAMPING TO MAINTAIN STABLE FLUX. ELIMINATION OF FLUX TRANSIENT WILL BE DEMONSTRATED IN ACTUAL MBE ENVIRONMENT.

* information listed above is at the time of submission.

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