In-Situ Control Using Spectral Pyrometric Interferometry for Electronics Manufacturing

Award Information
Agency:
Department of Defense
Branch
Defense Advanced Research Projects Agency
Amount:
$99,485.00
Award Year:
1994
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Award Id:
26647
Agency Tracking Number:
26647
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
7620 Executive Drive, Eden Prairie, MN, 55344
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Andrew Wowchak
(612) 934-5502
Business Contact:
() -
Research Institution:
n/a
Abstract
The future manufacturing of electronic devices will require even better control of the manufacturing process. Temperature and thin film thickness are two most critical variables in many production processes such as chemical vapor deposition (CVD), rapid thermal processing (RTP), and plasma etching. We will invesigate a unique spectral optical pyrometric interferometry (SPI) for closed loop control of the two parameters in these processes. The SPI technique utilizes the changing interference effects in the surface layer to measure water temperature and layer thickness resolution of 0.5 nm are amongst the best known of any techniques. We will demonstrate that data acquired from the measurements can be used for feedback control of the processes. Because the technique is non-invasive, insensitive to mechanical vibrations and hostile environments, and can be done in real time, SPI is truly suited for electronics manufacturing as well as for quality inspection applications. Anticipated Benefits: The spectral pyrometric interferometry technique is an enabling technique for electronics manufacturing. It can increase the production yield of high performance electronics by improved control of important process variables. The technique can be widely used in many semiconductor manufacturing processes essential for consumer electronics.

* information listed above is at the time of submission.

Agency Micro-sites


SBA logo

Department of Agriculture logo

Department of Commerce logo

Department of Defense logo

Department of Education logo

Department of Energy logo

Department of Health and Human Services logo

Department of Homeland Security logo

Department of Transportation logo

Enviromental Protection Agency logo

National Aeronautics and Space Administration logo

National Science Foundation logo
US Flag An Official Website of the United States Government