Low Cost Nanolithography Techniques Using Elastomer Shrinkage and/or Plasmon Confinement

Award Information
Agency: Department of Defense
Branch: Defense Advanced Research Projects Agency
Contract: W31P4Q-05-C-R068
Agency Tracking Number: 04SB3-0248
Amount: $98,990.00
Phase: Phase I
Program: SBIR
Awards Year: 2004
Solicitation Year: 2004
Solicitation Topic Code: SB043-045
Solicitation Number: 2004.3
Small Business Information
2650 East Foothill Boulevard, Pasadena, CA, 91107
DUNS: 195754056
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Ravi Verma
 (626) 792-3000
Business Contact
 Kevin Dinniene
Title: Controller
Phone: (626) 792-3000
Email: kevin@tanner.com
Research Institution
Nanolithography remains the critical hurdle in developing and commercializing new nanotechnology devices. A low cost nanolithography technique must be developed if the promise of nanotechnology is to be fully realized. Tanner Research and Stanford University are proposing two new nanolithography techniques based on elastomer shrinkage and plasmon confinement. Both of these techniques will be pursued in parallel during Phase I wherein we will demonstrate the proof of concept for lithography at 35-40 nm feature sizes, mitigate the associated risk areas, and develop specific applications for the two techniques.

* Information listed above is at the time of submission. *

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