Mass Fabrication of MEMS-based Micro Detonator Technology

Tanner Research proposes to leverage an ongoing four-year development effort, supporting ARDEC Warhead and Energetic Directorate in part, to implement low-cost micro- energetics devices for use as `nano-scale' initiators and detonators. Tanner's micro-energetics devices are currently 2.5mm and mass fabricated in silicon and glass with the energetics applied during a post-processing procedure. The complete detonator device requires about 50 µjoules at 3vDC for initiation. Tanner will develop two MEMS-based mass fabrication techniques to demonstrate processes for single-point and multi-point precision-application detonators. For example, high volume, high throughput manufacturing and loading is facilitated by fabricating the initiator/energetics on a cost effective substrate. Tanner contends that detonators can be mass-produced at approximately 20-cents per device with this fully integrated process. During Phase I, Tanner will also study the efficacy of applying a pioneering technique for mass loading of energetics into micro and nano-scale cavities, called READ. This technique, although more costly, will ensure multipoint initiators (MPI) have absolute simultaneity through an identical, controlled fabrication process.