Mass Fabrication of MEMS-based Micro Detonator Technology

Award Information
Agency:
Department of Defense
Branch:
Army
Amount:
$119,957.00
Award Year:
2004
Program:
SBIR
Phase:
Phase I
Contract:
W15QKN-04-C-1058
Agency Tracking Number:
A032-4151
Solicitation Year:
2003
Solicitation Topic Code:
A03-009
Solicitation Number:
2003.2
Small Business Information
TANNER RESEARCH, INC.
2650 East Foothill Boulevard, Pasadena, CA, 91107
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
195754056
Principal Investigator
 Amish Desai
 MEMS Product Development
 (626) 792-3000
 amish.desai@tanner.com
Business Contact
 Kevin Dinniene
Title: Controller
Phone: (626) 792-3000
Email: kevin.dinniene@tanner.com
Research Institution
N/A
Abstract
Tanner Research proposes to leverage an ongoing four-year development effort, supporting ARDEC Warhead and Energetic Directorate in part, to implement low-cost micro- energetics devices for use as `nano-scale' initiators and detonators. Tanner's micro-energetics devices are currently 2.5mm and mass fabricated in silicon and glass with the energetics applied during a post-processing procedure. The complete detonator device requires about 50 µjoules at 3vDC for initiation. Tanner will develop two MEMS-based mass fabrication techniques to demonstrate processes for single-point and multi-point precision-application detonators. For example, high volume, high throughput manufacturing and loading is facilitated by fabricating the initiator/energetics on a cost effective substrate. Tanner contends that detonators can be mass-produced at approximately 20-cents per device with this fully integrated process. During Phase I, Tanner will also study the efficacy of applying a pioneering technique for mass loading of energetics into micro and nano-scale cavities, called READ. This technique, although more costly, will ensure multipoint initiators (MPI) have absolute simultaneity through an identical, controlled fabrication process.

* information listed above is at the time of submission.

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