Nanolithography with negative index materials.

Award Information
Agency: Department of Defense
Branch: Defense Advanced Research Projects Agency
Contract: W31P4Q-09-C-0262
Agency Tracking Number: 07SB2-0421
Amount: $749,971.00
Phase: Phase II
Program: SBIR
Awards Year: 2009
Solicitation Year: 2007
Solicitation Topic Code: SB072-028
Solicitation Number: 2007.2
Small Business Information
825 S. Myrtle Ave., Monrovia, CA, 91016
DUNS: 195754056
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Hyesog Lee
 (626) 471-9700
Business Contact
 Kevin Dinniene
Title: Controller
Phone: (626) 471-9778
Research Institution
The DoD has a strong motivation to foster low cost nanolithography techniques ~ its IC requirements are in small volumes, thus tooling and masking costs cannot be amortized over large volumes and represents a very large number. The costs associated with the nanolithography step can be ascribed to the diffraction limit of light. Recently, it was shown that the diffraction limit of light could be circumvented by the use of materials with “negative refractive index”. Lenses that operate beyond the diffraction limit were demonstrated at 365 nm working wavelength. Tanner is proposing the use of such negative index materials as the critical enabling technology in a low cost nanolithography system. In Phase I, we demonstrated that negative index materials could be realistically fabricated at 193 nm (the working wavelength for current nanolithography systems). In Phase II, we will extend the work to a physical demonstration of a farfield superlens (FSL), a nearfield superlens, and a projection hyperlens. We will also work with the semiconductor industry to develop a design for a lithography system, along with a complete set of metrics that would be of interest to the industry.

* Information listed above is at the time of submission. *

Agency Micro-sites

SBA logo
Department of Agriculture logo
Department of Commerce logo
Department of Defense logo
Department of Education logo
Department of Energy logo
Department of Health and Human Services logo
Department of Homeland Security logo
Department of Transportation logo
Environmental Protection Agency logo
National Aeronautics and Space Administration logo
National Science Foundation logo
US Flag An Official Website of the United States Government