MOLYBDENUM COATING PROCESS USING LIQUID METALLO-ORGANIC PRECURSORS

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: N/A
Agency Tracking Number: 17434
Amount: $50,000.00
Phase: Phase I
Program: SBIR
Awards Year: 1992
Solitcitation Year: N/A
Solitcitation Topic Code: N/A
Solitcitation Number: N/A
Small Business Information
Technical Research Associates
410 Chipeta Way, Suite 222, Salt Lake City, UT, 84108
Duns: N/A
Hubzone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Joseph K. Weeks
 (801) 582-8080
Business Contact
Phone: () -
Research Institution
N/A
Abstract
A NEW TECHNIQUE FOR DEPOSITING REFRACTORY METAL COATINGS ON CERAMICS OR SEMICONDUCTORS IS SUGGESTED. THE PROCESS IS BASED UPON A LIQUID PRECURSOR WHICH COULD BE COATED ON SEMICONDUCTOR WAFERS USING THE SAME TECHNIQUES WHICH ARE CURRENTLY USED FOR LIQUID RESIST COATINGS. AFTER BAKING, THE LIQUID PRECURSOR IS REDUCED TO A REFRACTORY METAL COATING IN HYDROGEN. UNLIKE METALLIZATION TECHNIQUES WHICH INVOLVE SPUTTERING OR CVD, THE PROCESS TAKES PLACE ENTIRELY AT ATMOSPHERIC PRESSURE, POTENTIALLY REDUCING THE COMPLEXITY AND COST OF METALLIZATION. ALSO, LARGER, COMPLEX SURFACES CAN BE COATEDPOTENTIALLY MORE EASILY THAN IS POSSIBLE BY VACUUM PROCESSES.

* information listed above is at the time of submission.

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