Novel Sensors for Control of Thin Film Deposition

Award Information
Agency: Department of Defense
Branch: Defense Advanced Research Projects Agency
Contract: N/A
Agency Tracking Number: 32527
Amount: $98,320.00
Phase: Phase I
Program: SBIR
Awards Year: 1996
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
Technology Assessment &
133 Defense Hwy., #212,, Annapolis, MD, 21401
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 David Palaith
 (301) 261-8373
Business Contact
Phone: () -
Research Institution
N/A
Abstract
The objectives of the proposed effort are to develop two novel sensors for measuring the product of the film stress with the film thickness, and for measuring the film thickness in situ and in real time during magnetron sputter deposition of thin films. The novel features of these sensors are that they physically move with the production substrates inside the deposition chamber, and that they use substrate materials identical to those used in production. The data from these two sensors will be combined to give a measurement of the mechanical stress in the film as the film is being fabricated. Since the relationship between film stress and processing conditions already is well-documented for magnetron sputter deposition, this stress measurement can be used as input for intelligent film deposition. A preliminary wavelet-based denoising and feature extraction algorithm will be developed. Laboratory simulations will be performed to demonstrate both the sensor feasibility and the analysis methods.

* information listed above is at the time of submission.

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