HIGH-FORCE MICROACTUATOR USING NICKEL-TITANIUM SHAPE-MEMORY ALLOY

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: N/A
Agency Tracking Number: 11873
Amount: $249,334.00
Phase: Phase II
Program: SBIR
Awards Year: 1991
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
Tini Alloy Co
1144 65th Street, Oakland, CA, 94608
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Dr A David Johnson
 () -
Business Contact
Phone: () -
Research Institution
N/A
Abstract
TINI ALLOY COMPANY PROPOSES TO DEVELOP HIGH-FORCE MICRO-ACTUATORS USING VACUUM DEPOSITED SHAPE-MEMORY ALLOYS. IMPROVED MICRO-ACTUATORS ARE NEEDED FOR MICRO-MECHANICAL DEVICES NOW BEING RESEARCHED IN LABORATORIES (AND WHICH WILL REACH MARKET MATURITY IN A FEW YEARS) AND FOR AT LEAST ONE DEVICE NOW IN COMMERCIAL PRODUCTION (A GAS CHROMATOGRAPH ON A SILICON CHIP). THE POTENTIAL ADVANTAGE OF SHAPE-MEMORY ALLOY MICROACTUATORS OVER ELECTROSTATIC DEVICES IS SEVERAL ORDERS OF MAGNITUDE INCREASE IN FORCE AND DISPLACEMENT. TINI SHAPE-MEMORY ALLOYTOLERATES LARGE STRAIN, 3-5 PERCENT, AND PRODUCES LARGE STRESS, GREATER THAN 100 MPA. THIN FILMS OF TINI SHAPE-MEMORY ALLOY, WHICH HAVE BEEN DEMONSTRATED IN OUR LABORATORY TO EXHIBIT A FORCEFUL SHAPE RECOVERY, WILL BE INCORPORATED WITH SILICON COMPONENTS BY MICRO-FABRICATION. THE COMBINED TECHNOLOGIES OF SHAPE-MEMORY ALLOY AND SILICON WILL RESULT IN A NEW ENGINEERING MATERIAL FOR MICRO-MECHANICAL APPLICATIONS. THE RESEARCH OBJECTIVES TO BE ADDRESSED INCLUDE: IMPROVED VACUUM SPUTTERING TECHNIQUES TO IMPROVE YIELD AND QUALITY OF FILM; PHYSICAL CHARACTERIZATION OF TINI FILM; PLANAR FABRICATION BY MASKING AND SELECTIVE ETCHING; AND DEVELOPMENT OF FUNCTIONAL COMPONENTS SUCH AS VALVE AND PUMP ACTUATORS.

* information listed above is at the time of submission.

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