Latching Miniature Valve

Award Information
Agency:
National Aeronautics and Space Administration
Branch:
N/A
Amount:
$597,726.00
Award Year:
2001
Program:
SBIR
Phase:
Phase II
Contract:
N/A
Agency Tracking Number:
992424
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
TiNi Alloy Company
1621 Neptune Drive, San Leandro, CA, 94577
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
N/A
Principal Investigator
 A. Johnson
 President
 () -
 tini1@holonet.net
Business Contact
 Eric Strauss
Title: Secretary - Treasurer
Phone: (510) 483-9676
Email: tini1@holonet.net
Research Institution
N/A
Abstract
A tightly-sealing, non-corrosive miniature valve that can be baked and requires power only during on/off switching has many applications, especially in the semiconductor manufacturing industry.A tight seal (10e-10 SCCM) requires a large force. Ability to tolerate bake-out, corrosion resistance, and cleanliness (freedom from organic and hydrocarbon contaminants) limits suitable materials to stainless steel and similar metals.Large force, small volume, and light weight actuation are feasible using electrically-powered shape-memory alloy (SMA) devices. Incorporating a latching mechanism, so that power is required only during on/off switching, compensates for the large power requirement of SMA actuators.The proposed valve consists of a welded extensible tube containing a poppet and matching orifice. When closed, the poppet and orifice are pressed together by a bistable spring. The bistable spring latch mechanism is moved from closed to open position by a shape-memory actuator that elongates the extensible tube. A second SMA actuator reverses the latch from the open to the closed position. In Phase I, an all-metal poppet/orifice combination will be developed to give low leak rates, forceful SMA actuators will be designed and built, a suitable latching device will be designed, and proof-of-concept latching valves will be fabricated.

* information listed above is at the time of submission.

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