In-Line Real Time Wafer Level Monitoring Techniques

Award Information
Agency:
Department of Defense
Branch:
Air Force
Amount:
$54,532.00
Award Year:
1994
Program:
SBIR
Phase:
Phase I
Contract:
N/A
Agency Tracking Number:
26101
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Turner Engineering Technology
P.o. Box 1502, 612 Oak Street, Roanoke, TX, 76262
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
N/A
Principal Investigator
 Timothy E. Turner
 (817) 491-9517
Business Contact
Phone: () -
Research Institution
N/A
Abstract
We propose to research in-line real time wafer level monitoring techniques for use in development of new semiconductor processes and for the monitoring of semiconductor process equipment and techniques as a process control function. All of these techniques will monitor actual reliability failure mechanisms not indirect performance criteria. All will minimize the processing necessary between the actual process step in question and the ability to accomplish the required reliability test. This program will concentrate on tests that can be performed with existing test equipment and probing techniques.

* information listed above is at the time of submission.

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