DEVELOPMENT OF THIN REFRACTORY FILMS OF TIB2 BN NBN AND SIC ON FUSED SIO2 CRUCIBLES

Award Information
Agency:
Department of Defense
Branch
Air Force
Amount:
$49,996.00
Award Year:
1987
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Award Id:
6600
Agency Tracking Number:
6600
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
12173 Montague St, Pacoima, CA, 91331
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
R B KAPLAN
(818) 899-0236
Business Contact:
() -
Research Institution:
n/a
Abstract
THE ABILITY TO CONTROL UNWANTED IMPURITY LEVELS DURING ELECTRONIC DEVICE FABRICATION IS ESSENTIAL TO ESTABLISHING THE DESIRED PROPERTIES FOR DEVICE RELIABILITY. IN PHASE I ULTRAMET WILL DEMONSTRATE THE FEASIBILITY OF DEPOSITING THIN, ULTRA-HIGH PURITY FILMS OF BN, TIB2, NBN AND SIC ON FUSED SIO2 CRUCIBLES. A SUCCESSFUL COMPLETION OF PHASE I WILL RESULT IN METALLIC IMPURITIES IN THE COATINGS OF 5PPM AND COATING ADHERENCE UNDER CYCLIC CONDITIONS FROM ROOM TEMPERATURE TO 1300 DEG C. BASED ON THE EXTENSIVE CVD EXPERIENCE AT ULTRAMET, WE FEEL THAT THIS PROGRAM HAS A VERY HIGH PROBABILITY OF SUCCESS.

* information listed above is at the time of submission.

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