SBIR Phase I: ACIM deBonder: Thin Film Integrity Testing using controlled microcavitation

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: 0232907
Agency Tracking Number: 0232907
Amount: $100,000.00
Phase: Phase I
Program: SBIR
Awards Year: 2003
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
6923 Redbud Drive, Manhattan, KS, 66503
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Sameer Madanshetty
 () -
Business Contact
Phone: () -
Research Institution
N/A
Abstract
This Small Business Innovation Research (SBIR) Phase I project will develop a new method of measuring how strongly a thin film anchors to its substrate. To date no method exists that can truly measure thin film adhesion. The Acoustic Coaxing Induced Microcaviation (ACIM) deBonder uses controlled microcavitation to directly reveal a thin film's adhesion strength by subjecting it to controlled erosion. ACIM is a means of constructively controlling acoustic microcavitation. By directing ACIM's high intensity energy implosions at specific film sites one can quantitatively determine adhesion strength. The potential commercial benefits will be applicable to any type of film or coating that can erode in a controlled manner by cavitation. This technique is a nondestructive method that only uses small areas of films. No special sample preparation is needed and the method is capable of in situ inspection. Microelectronic manufacturing and the semiconductor industries will benefit from this technology.

* Information listed above is at the time of submission. *

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