SBIR Phase I: A Quality Monitor for Enabling Water Recycling in Semiconductor Processing - The Particle Scout

Award Information
Agency:
National Science Foundation
Branch
n/a
Amount:
$100,000.00
Award Year:
2005
Program:
SBIR
Phase:
Phase I
Contract:
0512803
Award Id:
74881
Agency Tracking Number:
0512803
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
6923 Redbud Drive, Manhattan, KS, 66503
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Sameer Madanshetty
Dr
(785) 293-4917
sameer@ksu.edu
Business Contact:
Sameer Madanshetty
Dr
(785) 532-2609
sameer@ksu.edu
Research Institution:
n/a
Abstract
This Small Business Innovation Research (SBIR) Phase I project concerns Ultrapure Water (UPW), the lifeblood of the semiconductor industry. The proposed instrument seeks to satisfy the International Technology Roadmap for Semiconductors (ITRS) requirements on two counts: 1. full flow inspections, 2. detection of sub-100nm liquid-borne particles. A typical semiconductor fab uses about 3 million gallons of UPW every day. To control operating costs and ensure sustainable growth, ITRS specifies that 70% of the UPW used in 2005 be recycled or reused (90% by 2010). As a UPW quality monitor fast enough to truly be an in-line, real-time particle detector of an entire DI water stream at the ultimate (50 nm and below) level of particulate purity, the Acoustic Coaxing Induced Microcavitation (ACIM) Particle Scout will enable these ITRS objectives for recycling UPW. The proposed ACIM Particle Scout is designed to meet important financial (operating costs) and quality (sub-100nm precision) needs of the Semiconductor industry. Beyond the IC manufacturing industry the Particle Scout will find applications in all UPW-intensive enterprises: nuclear reactors and other power generators, the pharmaceutical industry, biotechnology, space exploration, and processing of advanced high purity chemicals. This concept will enable and enhance environmental initiatives for the recycling of UPW.

* information listed above is at the time of submission.

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