Development of an Advanced High Yield Cost Effective SiC Process Technology for Manufacturing a New Class of SiC Power Devices

Award Information
Agency: Department of Defense
Branch: Defense Advanced Research Projects Agency
Contract: DAAH0101CR200
Agency Tracking Number: 00SB1-0259
Amount: $150,000.00
Phase: Phase II
Program: SBIR
Awards Year: 2001
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
100 Jersey Ave., New Brunswick, NJ, 08901
DUNS: 042068101
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Maurice Weiner
 Vice President
 (732) 565-9500
Business Contact
 Maurice Weiner
Title: Vice President
Phone: (732) 565-9500
Research Institution
We propose to improve and fully develop the innovative cost-effective SiC process technology demonstrated in Phase I to fabricate and commercialize a novel SiC vertical JFET (VJFET) whose feasibility has been firmly demonstrated in Phase I. The innovativeprocess technology and the novel SiC VJFET device structure will make it possible (I) to reduce the high power dissipation of SiC devices from the order of 1E3 W/ to less than 200W/, (II) to dramatically improve SiC power device reliability whenoperating at high temperatures, (III) to allow SiC power switches be fabricated for operations at temperatures of 300 C and above, (IV) to manufacture SiC power VJFET switches, and (V) to reduce the costs of the SiC power devices due to the greatlyimproved process yield. In Phase II we will optimize the device structure by computer modeling, fully develop the process technology to fabricate VJFETs with 50% reduction in cell size, and drastically increase the power level of SiC VJFETs for hightemperature (250-300C), high frequency (30-50Hz) and high power (35-45 HP) SiC inverter demonstration.

* Information listed above is at the time of submission. *

Agency Micro-sites

SBA logo
Department of Agriculture logo
Department of Commerce logo
Department of Defense logo
Department of Education logo
Department of Energy logo
Department of Health and Human Services logo
Department of Homeland Security logo
Department of Transportation logo
Environmental Protection Agency logo
National Aeronautics and Space Administration logo
National Science Foundation logo
US Flag An Official Website of the United States Government