LOW COST SILICON ACCELEROMETER

Award Information
Agency: Department of Defense
Branch: Navy
Contract: N/A
Agency Tracking Number: 6637
Amount: $577,300.00
Phase: Phase II
Program: SBIR
Awards Year: 1990
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
8801 Encino Ave, Northridge, CA, 91325
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Dr Mahendra Singh
 (818) 704-9783
Business Contact
Phone: () -
Research Institution
N/A
Abstract
RESEARCH TO DESIGN AND DEVELOP A LOW COST INERTIAL GRADE SILICON ACCELEROMETER IS PROPOSED HERE. THE MAIN OBJECTIVE OF THE EFFORT IS TO SHOW THAT IT IS POSSIBLE TO BUILD AN ACCELEROMETER ON A SINGLE CRYSTAL SILICON CHIP, CAPABLE OF HANDLING MID-COURSE GUIDANCE REQUIREMENTS OF A MISSILE. A SILICON WAFER IS CHEMICALLY ETCHED THROUGH A MULTI-STAGE PROCESS TO YIELD TORSIONALLY FLEXIBLE HINGE FLEXURES SUPPORTING A PROOF MASS. THE ACCELEROMETER UTILIZES A CAPACITIVE PICK-OFF TO MEASURE THE DEFLECTION OF THE PROOF MASS. THE PICK-OFF SIGNAL IS AMPLIFIED AND FED TO RESTORING CONTROLLER WHICH DRIVES THE ELECTROSTATIC FORCER TO COUNTER THE INERTIAL FORCE ACTING ON THE PROOF MASS. THE SIGNAL DIFFERENTIAL VOLTAGE INPUT TO THE FORCER IS A DIRECT MEASURE OF THE APPLIED ACCELERATION. A DETAILED DESIGN ANALYSIS WILL BE PERFORMED BEFORE BUILDING AN ENGINEERING MODEL OF THE ACCELEROMETER.

* Information listed above is at the time of submission. *

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