MODELING OF 3-D DIFFRACTION AND SCATTERING FROM SUBMICRON OBJECTS ON SILICON FOR PARTICULATE MONITORING AND PHOTOLITHOGRAPHY

Award Information
Agency:
National Science Foundation
Amount:
$40,000.00
Program:
SBIR
Contract:
N/A
Solitcitation Year:
N/A
Solicitation Number:
N/A
Branch:
N/A
Award Year:
1985
Phase:
Phase I
Agency Tracking Number:
2710
Solicitation Topic Code:
N/A
Small Business Information
Weidlinger Associates
333 Seventh Ave, New York, NY, 10001
Hubzone Owned:
N
Woman Owned:
N
Socially and Economically Disadvantaged:
N
Duns:
N/A
Principal Investigator
 Greogory L Wojcik
 Associate
 (415) 857-0960
Business Contact
Phone: () -
Research Institution
N/A
Abstract
N/A

* information listed above is at the time of submission.

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