MONOLAYER RESOLUTION CHARACTERIZATION BY VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY (VASE)

Award Information
Agency:
Department of Defense
Branch
Defense Advanced Research Projects Agency
Amount:
$426,000.00
Award Year:
1988
Program:
SBIR
Phase:
Phase II
Contract:
n/a
Award Id:
6650
Agency Tracking Number:
6650
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
2436 Sheridan, Lincoln, NE, 68502
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
John A Woollam
(402) 472-1964
Business Contact:
() -
Research Institute:
n/a
Abstract
ELLIPSOMETRY USES POLARIZED LIGHT REFLECTANCE TO CHARACTERIZE SURFACES, INTERFACES, AND THIN FILMS. ELLIPSOMETRY HAS TRADITIONALLY BEEN DONE USING A FEW (USUALLY ONE) DISCRETE ANGLES OF INCIDENCE OF THE LIGHT BEAM WITH A SURFACE NORMAL, AND A FEW SELECTED WAVELENGTHS (FREQUENTLY ONLY 632.8 NM FROM A HENE LASER). RECENTLY IT WAS SHOWN (BY WOOLLAM AND COWORKERS) THAT USING VARIABLE ANGLE OF INCIDENCE SPECTROSCOPIC ELLIPSOMETRY THE SENSITIVITY CAN BE ENHANCED BY MORE THAN THREE ORDERS OF MAGNITUDE. THE USEFULNESS OF THIS TECHNIQUE FOR HETEROJUNCTION STRUCTURES WAS DEMONSTRATED. THE PURPOSE OF THIS CONTRACT IS THREEFOLD: TO DEVELOP VASE FOR MOCVD GROWN MULTILAYER SEMICONDUCTOR DIAGNOSTICS, TO ENHANCE THE DATA ACQUISITION SPEED BY A FACTOR OF TEN (THUS PERMITTING IN-SITU CAPABILITIES), AND TO DEVELOP THE CAPABILITY TO ANALYZE DATA FROM SEMICONDUCTOR SUPERLATTICES USING AN IBM AT COMPATIBLE COMPUTER.

* information listed above is at the time of submission.

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