Cryogenic MEMS Pressure Sensor

Award Information
Agency:
National Aeronautics and Space Administration
Branch
n/a
Amount:
$100,000.00
Award Year:
2009
Program:
SBIR
Phase:
Phase I
Contract:
NNX09CD35P
Award Id:
90634
Agency Tracking Number:
084069
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
1923 Big Horn Avenue, Unit B, Sheridan, WY, 82801
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
127209562
Principal Investigator:
ZacharyGray
Principal Investigator
(307) 752-2615
zg@WyomingSilicon.com
Business Contact:
ZacharyGray
Business Official
(307) 752-2615
zg@WyomingSilicon.com
Research Institute:
n/a
Abstract
A directly immersible cryogenic MEMS pressure sensor will be developed. Each silicon die will contain a vacuum-reference and a tent-like membrane. Offsetting thermal effects allow the device to operate over a wide temperature range. Using a patented, proven design the device is capable of continuous low-power operation and provides accuracies as low as 0.002 % of reading.

* information listed above is at the time of submission.

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