Cryogenic MEMS Pressure Sensor
National Aeronautics and Space Administration
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Small Business Information
Wyoming Silicon, LLC
1923 Big Horn Ave Unit B, Sheridan, WY, 82801-6028
Socially and Economically Disadvantaged:
AbstractA directly immersible cryogenic MEMS pressure sensor will be developed. Each silicon die will contain a vacuum-reference and a tent-like membrane. Offsetting thermal effects allow the device to operate over a wide temperature range. Using a patented, proven design the device is capable of continuous low-power operation and provides accuracies as low as 0.002 % of reading.
* information listed above is at the time of submission.