SPUTTERED METALLIC GLASS FOR ACCELEROMETERS

Award Information
Agency: Department of Defense
Branch: Navy
Contract: N/A
Agency Tracking Number: 9267
Amount: $400,000.00
Phase: Phase II
Program: SBIR
Awards Year: 1989
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
Xi Magnetics Inc.
Box 457a - Rd 4, Coatesville, PA, 19320
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Dr John L Wallace
 (215) 347-1768
Business Contact
Phone: () -
Research Institution
N/A
Abstract
THE IMMEDIATE GOAL OF THIS PROPOSED WORK IN PHASE I IS TO SPUTTER DEPOSIT AND TEST SAMPLES OF METALLIC GLASS ON SILICON WAFERS. THE LONG TERM GOAL IS TO FABRICATE LOW COST, MONOLITHIC ACCELEROMETERS WHERE ALL OF THE COMPONENTS ARE INTEGRATED ONTO A SINGLE SILICON WAFER. THE MOST IMPORTANT PHASE I TASK WILL BE TO DEVELOP TECHNIQUES FOR DEPOSITING FILMS WITH BUILT-IN UNIAXIAL ANISOTROPY AND VERY LOW LEVELS OF INTRINSIC STRESS. THEN THE SENSITIVITY OF THESE FILMS (I.E. THE CHANGES IN PERMEABILITY AS A FUNCTION OF APPLIED STRESS) WILL BE MEASURED. A SECOND, LOWER PRIORITY PHASE I TASK WILL BE TO STUDY WAYS OF ELIMINATING THE USE OF DISCRETE SENSING COILS IN FAVOR OF A TRULY MONOLITHIC CONSTRUCTION.

* information listed above is at the time of submission.

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