SPUTTERED METALLIC GLASS FOR ACCELEROMETERS

Award Information
Agency:
Department of Defense
Branch
Navy
Amount:
$400,000.00
Award Year:
1989
Program:
SBIR
Phase:
Phase II
Contract:
n/a
Agency Tracking Number:
9267
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Xi Magnetics Inc.
Box 457a - Rd 4, Coatesville, PA, 19320
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Dr John L Wallace
(215) 347-1768
Business Contact:
() -
Research Institution:
n/a
Abstract
THE IMMEDIATE GOAL OF THIS PROPOSED WORK IN PHASE I IS TO SPUTTER DEPOSIT AND TEST SAMPLES OF METALLIC GLASS ON SILICON WAFERS. THE LONG TERM GOAL IS TO FABRICATE LOW COST, MONOLITHIC ACCELEROMETERS WHERE ALL OF THE COMPONENTS ARE INTEGRATED ONTO A SINGLE SILICON WAFER. THE MOST IMPORTANT PHASE I TASK WILL BE TO DEVELOP TECHNIQUES FOR DEPOSITING FILMS WITH BUILT-IN UNIAXIAL ANISOTROPY AND VERY LOW LEVELS OF INTRINSIC STRESS. THEN THE SENSITIVITY OF THESE FILMS (I.E. THE CHANGES IN PERMEABILITY AS A FUNCTION OF APPLIED STRESS) WILL BE MEASURED. A SECOND, LOWER PRIORITY PHASE I TASK WILL BE TO STUDY WAYS OF ELIMINATING THE USE OF DISCRETE SENSING COILS IN FAVOR OF A TRULY MONOLITHIC CONSTRUCTION.

* information listed above is at the time of submission.

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