In-Situ, Real-Time Process Control for Micro-Electro-Mechanical System (MEMS) Applications

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: 9860514
Agency Tracking Number: 9860514
Amount: $99,946.00
Phase: Phase I
Program: SBIR
Awards Year: 1999
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
87 Church Street, East Hartford, CT, 11111
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Sylvia Charpenay
 () -
Business Contact
Phone: () -
Research Institution
N/A
Abstract
N/A

* Information listed above is at the time of submission. *

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