In-Situ, Real-Time Process Control for Micro-Electro-Mechanical System (MEMS) Applications

Award Information
Agency:
National Science Foundation
Branch:
N/A
Amount:
$99,946.00
Award Year:
1999
Program:
SBIR
Phase:
Phase I
Contract:
9860514
Agency Tracking Number:
9860514
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
On-Line Technologies Inc
87 Church Street, East Hartford, CT, 11111
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
N/A
Principal Investigator
 Sylvia Charpenay
 () -
Business Contact
Phone: () -
Research Institution
N/A
Abstract
N/A

* information listed above is at the time of submission.

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