In-Situ Characterization of Photresist Properties by Fourier Trnasform Infrared Based IR Spectroscopy

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: 9860798
Agency Tracking Number: 9860798
Amount: $99,699.00
Phase: Phase I
Program: SBIR
Awards Year: 1999
Solitcitation Year: N/A
Solitcitation Topic Code: N/A
Solitcitation Number: N/A
Small Business Information
On-Line Technologies Inc
87 Church Street, East Hartford, CT, 99999
Duns: N/A
Hubzone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Matthew Richter
 () -
Business Contact
Phone: () -
Research Institution
N/A
Abstract
N/A

* information listed above is at the time of submission.

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