In-Situ Characterization of Photresist Properties by Fourier Trnasform Infrared Based IR Spectroscopy

Award Information
Agency:
National Science Foundation
Amount:
$99,699.00
Program:
SBIR
Contract:
9860798
Solitcitation Year:
N/A
Solicitation Number:
N/A
Branch:
N/A
Award Year:
1999
Phase:
Phase I
Agency Tracking Number:
9860798
Solicitation Topic Code:
N/A
Small Business Information
On-Line Technologies Inc
87 Church Street, East Hartford, CT, 99999
Hubzone Owned:
N
Woman Owned:
N
Socially and Economically Disadvantaged:
N
Duns:
N/A
Principal Investigator
 Matthew Richter
 () -
Business Contact
Phone: () -
Research Institution
N/A
Abstract
N/A

* information listed above is at the time of submission.

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