Optical Instrumentation for MEMS Oscillatory Parallel-Plate Rheometer
Small Business Information
15 Cabot Road, Woburn, MA, 01801-1003
AbstractLeveraging Agiltron’s industrial leading developments for optical measurement of motion in MEMS devices, we propose to use electro-optical sensors for measuring the displacement and gap in the NIST micro-rheometer. No electrical connections are required to the moving parts. All electronics and optics are removed from the chip so that it is inexpensive and disposable. A fixed, simple micro-fluidic channel is added to cover plate to allow automated calibrated filling of the sample volume. The technical approach will be proved in Phase 1 through the numerical analysis, design and experiments. Complete drawings will be delivered to NIST at the end of Phase 1. A portable prototype instrument with multiple, disposable sensor chips will be fabricated in Phase 2 for testing and delivery to NIST.
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