Massively Parallel High Temperature Probe System for Wafer-level Reliability Testing

Award Information
Agency:
Department of Commerce
Branch
National Institute of Standards and Technology
Amount:
$300,000.00
Award Year:
2011
Program:
SBIR
Phase:
Phase II
Contract:
SB1341-11-CN-0094
Award Id:
n/a
Agency Tracking Number:
103-68-2011
Solicitation Year:
2010
Solicitation Topic Code:
9.10.02.1-R
Solicitation Number:
n/a
Small Business Information
14763 Energy Way, Apple Valley, MN, 55124-5762
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
111765657
Principal Investigator:
Jon Dunklee
(503) 505-0247
Business Contact:
Research Institute:
n/a
Abstract
Historical methods of reliability assessment are less and less effective as device sizes shrink. Larger sample sizes and longer duration tests are increasingly needed. At the same time, efforts to continue scaling semiconductors to ever smaller geometries is leading to an explosion of new device structures, materials and processes. The cost of testing these innovations is becoming a major barrier to their commercialization. The NIST Phase 1 project demonstrated that existing reliability test systems cannot reduce the cost of test significantly for these long duration tests, but concluded that a tightly integrated system offers the potential for a 10-fold reduction in test costs. However, a tightly integrated system introduces risks and unknowns due to the thermal, mechanical and electrical interaction of system components. The objective of this Phase 2 effort is to explore interactions between a broad range of feasible alternative identified in Phase 1 and develop the best possible combination into an integrated system.

* information listed above is at the time of submission.

Agency Micro-sites


SBA logo

Department of Agriculture logo

Department of Commerce logo

Department of Defense logo

Department of Education logo

Department of Energy logo

Department of Health and Human Services logo

Department of Homeland Security logo

Department of Transportation logo

Enviromental Protection Agency logo

National Aeronautics and Space Administration logo

National Science Foundation logo
US Flag An Official Website of the United States Government