Ultra High Temperature Capacitive Pressure Sensor

Award Information
Agency:
National Aeronautics and Space Administration
Branch:
N/A
Amount:
$599,993.00
Award Year:
2011
Program:
SBIR
Phase:
Phase II
Contract:
NNX11CA45C
Agency Tracking Number:
094590
Solicitation Year:
2009
Solicitation Topic Code:
A2.02
Solicitation Number:
N/A
Small Business Information
Sporian Microsystems, Inc.
CO, Lafayette, CO, 80026-8821
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
128688111
Principal Investigator
 Kevin Harsh
 Principal Investigator
 (303) 516-9075
 harshk@sporian.com
Business Contact
 Michael Usrey
Title: Business Official
Phone: (303) 516-9075
Email: musrey@sporian.com
Research Institution
 Stub
Abstract
To improve the working performance, increase efficiency, reduce cost, and track system health status and failure modes of advanced propulsion systems; miniaturized, robust sensing systems for measuring and monitoring physical parameters, such as pressure, would be highly advantageous. Technical challenges for developing reliable sensing systems lie in extremely harsh working conditions the micro sensors must operate. In addition to high temperatures and pressures, these conditions include oxidation, corrosion, thermal shock, fatigue, fouling, and abrasive wear. High temperature (300-1350oC) capacitive pressure sensors are of particular interest due to their inherent suitability for wireless readout schemes. The objective of this proposed work is to develop a capacitive pressure sensor based on SiCN, a new class of high temperature ceramic materials, which possess excellent mechanical and electric properties at high temperatures (up to1600ºC). The Phase II effort will include: the development of materials formulations and fabrication processes to realize optimized devices, device prototyping, and laboratory scale/relevant environment testing such as to achieve TRL 5-6.

* information listed above is at the time of submission.

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