MEMS Gyroscope with Interferometric Detection

Award Information
Agency: National Aeronautics and Space Administration
Branch: N/A
Contract: NNX11CG42P
Agency Tracking Number: 104964
Amount: $99,852.00
Phase: Phase I
Program: SBIR
Awards Year: 2011
Solicitation Year: 2010
Solicitation Topic Code: O4.01
Solicitation Number: N/A
Small Business Information
Fine Structure Technology LLC
TX, Austin, TX, 78759-5212
DUNS: 832984723
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Matthew Ellis
 Principal Investigator
 (425) 516-8442
Business Contact
 Matthew Ellis
Title: Business Official
Phone: (425) 516-8442
Research Institution
This SBIR Phase I project will develop a MEMS gyroscope that uses an ultra high resolution sensing technique for measuring proof mass motion. The goal is to demonstrate the feasibility of this concept by understanding the optical, mechanical, and electrical performance characteristics that result from using micro interferometric sensing in a MEMS gyroscope. Specific objectives of the Phase I effort are to (1) develop a system level model that captures the behaviors of interest and enables design decisions (2) demonstrate sufficient optical performance for high resolution sensing in a prototype scale package and (3) show that this sensing technique improves device stability by enabling a design with a large separation between the sense resonance frequency and drive resonance frequency. This large separation in frequencies results in a device with much greater stability and better performance over temperature enabling the use of this technology in metric tracking hardware and tactical navigation applications. The TRL at the beginning of the contract is between zero and one. At the end of the contract the TRL will be 3.

* information listed above is at the time of submission.

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