Miniature Electron-Cyclotron Resonance (ECR) Ion Source for Industrial Applications and Research

Award Information
Agency: Department of Energy
Branch: N/A
Contract: DE-FG02-10ER85955
Agency Tracking Number: 95064
Amount: $389,811.00
Phase: Phase II
Program: SBIR
Awards Year: 2011
Solicitation Year: 2011
Solicitation Topic Code: 45 d
Solicitation Number: DE-FOA-0000508
Small Business Information
11619 Chippenham Way, San Diego, CA, 92128-4281
DUNS: 111212234
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Wayne Cornelius
 (858) 485-6411
Business Contact
 Wayne Cornelius
Title: Mr.
Phone: (858) 485-6411
Research Institution
The electron-cyclotron resonance (ECR) source is rapidly becoming the de facto standard source for accelerator applications where a reliable, robust, and low maintenance source of positive ions is needed for a particular application. As a result, a wide variety of ECR sources have been developed for specific accelerator applications ranging from isotope production to proton therapy to ion implantation and industrial processing. Note however that even the simplest of these sources is relatively large and requires hundreds of kilowatts of RF power. Electron-cyclotron resonance (ECR) sources used for industrial processing, such as ion implantation, are larger still. A small, lightweight, and reliable high-current source of singly ionized atoms could have a revolutionary impact on accelerator systems and industrial processing. The design of a miniature ECR (miniECR) ion source, developed under a Phase I grant, is considerably smaller and more compact than those available today. This source makes judicious use of dielectric materials to shrink the dimensions of the ion source to values significantly smaller than the free-space wavelength (~12 cm). An additional benefit of this small size is a reduction in RF power required to energize the source from hundreds of Watts to less than 100 Watts. The design of the miniECR source was completed in Phase I and two sources were fabricated for testing. The proposed Phase II program characterizes miniECR sources under a variety of conditions specific to different missions. In particular, beams of protons produced by a miniECR source will be characterized to optimize the source for proton-beam accelerators (isotope production, proton therapy, etc.). Operation of a miniECR source with deuterium ions will be characterized to optimize source parameters for neutron sources. Finally, characterization of a miniECR source operating with heavy ions optimizes the source for production of ions suitable for ion implantation and as a source of ions for tuning charge-breeder injection lines. The small size of the miniECR source, coupled with the inherent ruggedness and reliability of ECR sources, simplifies considerably the ion injector of proton accelerators and neutron sources. The small size also enables large ion implantation sources to be replaced with an array of miniECR sources. Additionally a linear array of miniECR sources enables wafer processing by sweeping a line source of ions across the wafer. This approach is not possible with existing ion implantation systems and enables a new paradigm in ion implantation processing that is more compatible with the large-aperture bending magnets used to isolate a particular ion species for implanting in the wafer.

* Information listed above is at the time of submission. *

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