Defect Reduction at the Silicon (112) Wafer Surface by Amorphization and Recrystallization

Award Information
Agency:
Department of Defense
Branch
Missile Defense Agency
Amount:
$99,912.00
Award Year:
2011
Program:
STTR
Phase:
Phase I
Contract:
HQ0147-11-C-7674
Award Id:
n/a
Agency Tracking Number:
B11A-002-0020
Solicitation Year:
2011
Solicitation Topic Code:
MDA11-T002
Solicitation Number:
2011.A
Small Business Information
123 Case Circle, Ardmore, OK, -
Hubzone Owned:
N
Minority Owned:
Y
Woman Owned:
Y
Duns:
159048698
Principal Investigator:
John Dinan
Senior Research Scientist
(703) 360-3872
dinan@amethystresearch.com
Business Contact:
Todd Speaks
Comptroller
(580) 226-2751
accounts@amethystresearch.com
Research Institution:
Texas State University
Thomas Myers
601 University Dr.
San Marcos, TX, 78666-
(512) 245-1839
Nonprofit college or university
Abstract
Silicon wafers oriented on (112) are the preferred substrates for deposition of mercury cadmium telluride layers by molecular beam epitaxy. Surface defects introduced during polishing of the wafers degrade the quality of the epitaxy and the performance of infrared detectors fabricated within these materials. We propose a process for reducing the density of the defects that are inherent in the silicon and induced during wafer-polishing. The new process begins by ion implantation to render the region near the wafer surface amorphous. Industry-standard chemical-mechanical polishing of the amorphous surface will yield a surface that is smooth. This layer will then be recrystallized by a high-temperature anneal. Prior to annealing, hydrogenation of the wafer will be done to suppress defect formation during recrystallization. We anticipate that improvements in the quality of the (112) silicon surface will lead to higher operability values for LWIR focal plane arrays.

* information listed above is at the time of submission.

Agency Micro-sites


SBA logo

Department of Agriculture logo

Department of Commerce logo

Department of Defense logo

Department of Education logo

Department of Energy logo

Department of Health and Human Services logo

Department of Homeland Security logo

Department of Transportation logo

Enviromental Protection Agency logo

National Aeronautics and Space Administration logo

National Science Foundation logo
US Flag An Official Website of the United States Government