Flexible Micro- and Nano-Patterning Tools for Photonics

Award Information
Agency:
Department of Defense
Amount:
$99,916.00
Program:
STTR
Contract:
FA9550-11-C-0044
Solitcitation Year:
2010
Solicitation Number:
2010.B
Branch:
Air Force
Award Year:
2011
Phase:
Phase I
Agency Tracking Number:
O10B-006-1014
Solicitation Topic Code:
OSD10-T006
Small Business Information
Lumarray, Inc.
15 Ward Street, Somerville, MA, -
Hubzone Owned:
N
Woman Owned:
N
Socially and Economically Disadvantaged:
N
Duns:
187666644
Principal Investigator
 Henry Smith
 Principal Investigator
 (617) 253-6865
 hismith@lumarray.com
Business Contact
 Henry Smith
Title: President
Phone: (617) 253-6865
Email: hismith@lumarray.com
Research Institution
 University of Utah
 Todd B Nilsen
 1471 Federal Way
Salt Lake City, UT, 84102-
 (801) 581-8948
 Nonprofit college or university
Abstract
LumArray, Inc. is developing, and in 4 months will deliver to NIST, a maskless photolithography system of low cost that will meet the specifications for resolution, placement accuracy, overlay, throughput and multilevel alignment required in photonic devices. In Phase I, complex and dense patterns of arbitrary geometry, of relevance to photonics and optoelectronics, will be written, including ring resonators, waveguides and grating-based waveguide couplers. LumArray proposes to enable its ZP-150TM maskless photolithography system to pattern 3-dimensional structures in SU8 and other photoresists by developing, in collaboration with the University of Utah, a 3D proximity-effect correction algorithm. In Phase II this capability will be demonstrated. For patterning non-flat flexible substrates, LumArray will investigate, in Phase I, schemes for increasing the depth of focus, and in Phase II will demonstrate such writing. Although LumArray currently guarantees dense patterns only down to 200 nm using the ZP-150TM, the company is pursuing 3 independent paths to sub-100 nm resolution, two of which are the subject of proposals to other agencies. In Summary, LumArray asserts that all of the requirements of Topic # ODD10-T006 can be met by the ZP-150TM and the enhancements that we propose.

* information listed above is at the time of submission.

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