Improved MEMS inertial sensors with interferometric detection

Award Information
Agency: Department of Defense
Branch: Navy
Contract: N00014-11-M-0235
Agency Tracking Number: N111-064-0669
Amount: $72,037.00
Phase: Phase I
Program: SBIR
Awards Year: 2011
Solicitation Year: 2011
Solicitation Topic Code: N111-064
Solicitation Number: 2011.1
Small Business Information
Fine Structure Technology LLC
5114 BALCONES WOODS DR, STE 307 PMB 305, Austin, TX, -
DUNS: 832984723
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Matthew Ellis
 (512) 650-8314
Business Contact
 Matthew Ellis
Title: Principal
Phone: (512) 650-8314
Research Institution
This Small Business Innovation Research Phase I project will develop navigation grade MEMS inertial sensors that use an ultra high resolution sensing technique for measuring proof mass motion. The goal of the project is to demonstrate the feasibility of this concept by understanding the optical, mechanical, and electrical performance characteristics that result from using micro interferometric sensing in MEMS inertial sensors. Specific objectives of the Phase I effort are to (1) develop a system level model that captures the behaviors of interest and enables design decisions (2) demonstrate sufficient optical performance for high resolution sensing in a prototype scale package and (3) produce robust designs for an accelerometer and gyroscope. These technical areas will be explored to better understand the development risk and potential for commercial applications in high margin instrumentation markets and low margin consumer electronics markets.

* information listed above is at the time of submission.

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