Atomic Layer Deposition of PbZrxTi1-xO3 Thin Films for PiezoMEMS Applications

Award Information
Agency:
Department of Defense
Branch
Army
Amount:
$100,000.00
Award Year:
2012
Program:
STTR
Phase:
Phase I
Contract:
W911NF-12-C-0083
Award Id:
n/a
Agency Tracking Number:
A12A-020-0031
Solicitation Year:
2012
Solicitation Topic Code:
A12a-T020
Solicitation Number:
2012.A
Small Business Information
Structured Materials Industries (Currently Structured Materials Industries, Inc.)
201 Circle Drive North, Unit # 102, Piscataway, NJ, -
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
787144807
Principal Investigator:
Nick Sbrockey
Principal Scientist
(732) 302-9274
sbrockey@structuredmaterials.com
Business Contact:
Gary Tompa
President
(732) 302-9274
GSTompa@structuredmaterials.com
Research Institution:
Penn State University
Kevin White
222 Northpointe Boulevard
Freeport, PA, 16229-
(724) 295-7000
Nonprofit college or university
Abstract
In this STTR program, Structured Materials Industries, Inc. (SMI) will develop process technology to deposit uniform films of piezoelectric PbZrxTi1-xO3, on substrates with complex 3-dimensional topography. Piezoelectric PbZrxTi1-xO3 films are a critical technology for advanced Micro Electro Mechanical System (MEMS), to provide low power actuation in nanoscale devices. Our technical approach is based on atomic layer deposition (ALD), which can achieve the required uniform film deposition over the extreme topography of advanced MEMS. The successful conclusion of this work will enable the development of micro robotic devices, for future biomedical, imaging and communication applications.

* information listed above is at the time of submission.

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