Atomic Layer Deposition of PbZrxTi1-xO3 Thin Films for PiezoMEMS Applications

Award Information
Agency: Department of Defense
Branch: Army
Contract: W911NF-12-C-0083
Agency Tracking Number: A12A-020-0031
Amount: $100,000.00
Phase: Phase I
Program: STTR
Awards Year: 2012
Solicitation Year: 2012
Solicitation Topic Code: A12a-T020
Solicitation Number: 2012.A
Small Business Information
201 Circle Drive North, Unit # 102, Piscataway, NJ, -
DUNS: 787144807
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Nick Sbrockey
 Principal Scientist
 (732) 302-9274
 sbrockey@structuredmaterials.com
Business Contact
 Gary Tompa
Title: President
Phone: (732) 302-9274
Email: GSTompa@structuredmaterials.com
Research Institution
 Penn State University
 Kevin White
 222 Northpointe Boulevard
Freeport, PA, 16229-
 (724) 295-7000
 Nonprofit college or university
Abstract
In this STTR program, Structured Materials Industries, Inc. (SMI) will develop process technology to deposit uniform films of piezoelectric PbZrxTi1-xO3, on substrates with complex 3-dimensional topography. Piezoelectric PbZrxTi1-xO3 films are a critical technology for advanced Micro Electro Mechanical System (MEMS), to provide low power actuation in nanoscale devices. Our technical approach is based on atomic layer deposition (ALD), which can achieve the required uniform film deposition over the extreme topography of advanced MEMS. The successful conclusion of this work will enable the development of micro robotic devices, for future biomedical, imaging and communication applications.

* Information listed above is at the time of submission. *

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