Atomic Layer Deposition of Lead Zirconate Titanate Thin Films for PiezoMEMS Applications

Award Information
Agency: Department of Defense
Branch: Army
Contract: W911NF-12-C-0093
Agency Tracking Number: A12A-020-0291
Amount: $99,991.00
Phase: Phase I
Program: STTR
Awards Year: 2012
Solicitation Year: 2012
Solicitation Topic Code: A12a-T020
Solicitation Number: 2012.A
Small Business Information
1850 Frankfurst Avenue, Baltimore, MD, -
DUNS: 188955991
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Narsesse Nersessian
 Principal Investigator
 (443) 524-3330
 n_nersessian@mapcorp.com
Business Contact
 Peter MacShane
Title: Director - Business Development
Phone: (443) 524-3330
Email: macs@mapcorp.com
Research Institution
 UCLA
 J.P. Chang
 Chemical and Biomolecular Eng
5532-D Boelter Hall
Los Angeles, CA, 90095-
 (301) 206-7980
 Nonprofit college or university
Abstract
A big challenge in atomic layer deposition (ALD) of complex metal oxides is that the ALD temperature for one constituent oxide is often different from that of another. Researchers at University of California Los Angeles (UCLA), have developed thermal and radical enhanced ALD processes to address these concerns and realized the synthesis of many complex metal oxides, including PZT. Maritime Applied Physics Corporation (MAPC) is teaming up with UCLA to leverage this previous research and develop atomic layer deposition of PZT for MEMS scale actuation.

* Information listed above is at the time of submission. *

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