Atomic Layer Deposition of Lead Zirconate Titanate Thin Films for PiezoMEMS Applications

Award Information
Agency:
Department of Defense
Branch
Army
Amount:
$99,991.00
Award Year:
2012
Program:
STTR
Phase:
Phase I
Contract:
W911NF-12-C-0093
Agency Tracking Number:
A12A-020-0291
Solicitation Year:
2012
Solicitation Topic Code:
A12a-T020
Solicitation Number:
2012.A
Small Business Information
Maritime Applied Physics Corporation
1850 Frankfurst Avenue, Baltimore, MD, -
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
188955991
Principal Investigator:
Narsesse Nersessian
Principal Investigator
(443) 524-3330
n_nersessian@mapcorp.com
Business Contact:
Peter MacShane
Director - Business Development
(443) 524-3330
macs@mapcorp.com
Research Institution:
UCLA
J.P. Chang
Chemical and Biomolecular Eng
5532-D Boelter Hall
Los Angeles, CA, 90095-
(301) 206-7980
Nonprofit college or university
Abstract
A big challenge in atomic layer deposition (ALD) of complex metal oxides is that the ALD temperature for one constituent oxide is often different from that of another. Researchers at University of California Los Angeles (UCLA), have developed thermal and radical enhanced ALD processes to address these concerns and realized the synthesis of many complex metal oxides, including PZT. Maritime Applied Physics Corporation (MAPC) is teaming up with UCLA to leverage this previous research and develop atomic layer deposition of PZT for MEMS scale actuation.

* information listed above is at the time of submission.

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