Flexible Micro- and Nano-Patterning Tools for Photonics

Award Information
Agency: Department of Defense
Branch: Air Force
Contract: FA9550-12-C-0082
Agency Tracking Number: F2-6644
Amount: $749,934.00
Phase: Phase II
Program: STTR
Awards Year: 2012
Solicitation Year: 2010
Solicitation Topic Code: OSD10-T006
Solicitation Number: 2010.B
Small Business Information
15 WARD STREET, SOMERVILLE, MA, -
DUNS: 187666644
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Henry Smith
 PI
 (617) 253-6865
 hismith@lumarray.com
Business Contact
 Henry Smith
Title: President
Phone: (617) 253-6865
Email: hismith@lumarray.com
Research Institution
 University of Utah
 Gary C J.D.
 1471 Federal Way
Salt Lake City, UT, 84102-
 (801) 587-8074
 Nonprofit college or university
Abstract
This Phase II STTR proposal seeks to enhance the throughput and resolution of LumArray"s maskless photolithography system, the ZP-150, so that it meets the needs of photonic systems for high-fidelity, long-range spatial-phase coherence, full-wafer coverage, 3D structuring, patterning on non-flat surfaces, and sub-100 nm resolution. The ZP-150 is designed for compatibility with research as well as customized manufacturing of electronics, photonics and other products that employ micro- and nanoscale features. To exercise and demonstrate the enhanced performance achieved in the ZP-150, complex photonic-device structures will be written as well as computer-generated holograms and a diffractive-optical solar converter with over 30% photovoltaic efficiency. To achieve the desired enhancements, 7 specific tasks are proposed.

* Information listed above is at the time of submission. *

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