A high sensitive MEMS micro-gyroscope

Award Information
Agency:
Department of Defense
Branch
Navy
Amount:
$149,893.00
Award Year:
2012
Program:
SBIR
Phase:
Phase I
Contract:
M67854-12-C-6504
Agency Tracking Number:
N111-005-0963
Solicitation Year:
2011
Solicitation Topic Code:
N111-005
Solicitation Number:
2011.1
Small Business Information
Agiltron Corporation
15 Presidential Way, Woburn, MA, -
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
004841644
Principal Investigator:
Amit Ghosh
Senior MEMS Engineer
(508) 770-2061
aghosh@agiltron.com
Business Contact:
Amanda Contardo
Contracts Administrator
(781) 935-1200
acontardo@agiltron.com
Research Institution:
Stub




Abstract
Leveraging on our experience in MEMS component and sensor system fabrication, Agiltron proposes to realize a new type of MEMS microgyroscope with a simple scalable mechanism and high precision. The gyroscope will be fabricated in a MEMS structure, with a novel design concept that maximizes the resonant frequency difference between the driving and sensing mode, tuning the sensing mode to near free floating state. This will result in a sensor with unparalleled performance on low noise and bias stability, and provide a unique solution for cost-effective mass production. Being a sealed MEMS device, the gyroscope will be able to withstand severe environmental conditions in hand-held laser rangefinders. In the Phase I program, the feasibility of the proposed accelerometer technology will be demonstrated through both design and sensor fabrication.

* information listed above is at the time of submission.

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