A high sensitive MEMS micro-gyroscope

Award Information
Agency: Department of Defense
Branch: Navy
Contract: M67854-12-C-6504
Agency Tracking Number: N111-005-0963
Amount: $149,893.00
Phase: Phase I
Program: SBIR
Awards Year: 2012
Solicitation Year: 2011
Solicitation Topic Code: N111-005
Solicitation Number: 2011.1
Small Business Information
Agiltron Corporation
15 Presidential Way, Woburn, MA, -
DUNS: 004841644
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Amit Ghosh
 Senior MEMS Engineer
 (508) 770-2061
 aghosh@agiltron.com
Business Contact
 Amanda Contardo
Title: Contracts Administrator
Phone: (781) 935-1200
Email: acontardo@agiltron.com
Research Institution
 Stub
Abstract
Leveraging on our experience in MEMS component and sensor system fabrication, Agiltron proposes to realize a new type of MEMS microgyroscope with a simple scalable mechanism and high precision. The gyroscope will be fabricated in a MEMS structure, with a novel design concept that maximizes the resonant frequency difference between the driving and sensing mode, tuning the sensing mode to near free floating state. This will result in a sensor with unparalleled performance on low noise and bias stability, and provide a unique solution for cost-effective mass production. Being a sealed MEMS device, the gyroscope will be able to withstand severe environmental conditions in hand-held laser rangefinders. In the Phase I program, the feasibility of the proposed accelerometer technology will be demonstrated through both design and sensor fabrication.

* information listed above is at the time of submission.

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