SBIR Phase I:Economically and Environmentally Responsible Synthesis of Silane Gas for Use in High-Purity Silicon Production
National Science Foundation
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3600 Green Court, Ann Arbor, MI, 48105
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AbstractThis SBIR Phase I project will develop a process for direct synthesis of silane utilizing silicon, hydrogen and a plasma arc. The broader/commercial impact of the project will include the potential elimination of shipping of hazardous silane gas, and decreased production cost for silane gas. Both of these outcomes will have broad impact across the manufacturing of a wide variety of electronic equipment, computing equipment, solar power generation equipment, and other important products.
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