SBIR Phase I:Economically and Environmentally Responsible Synthesis of Silane Gas for Use in High-Purity Silicon Production

Award Information
Agency:
National Science Foundation
Branch
n/a
Amount:
$149,999.00
Award Year:
2010
Program:
SBIR
Phase:
Phase I
Contract:
1014162
Agency Tracking Number:
1014162
Solicitation Year:
n/a
Solicitation Topic Code:
CT8
Solicitation Number:
n/a
Small Business Information
EDA
3600 Green Court, Ann Arbor, MI, 48105
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
610511334
Principal Investigator:
Dean Massey
PhD
(734) 786-1434
massey@edapplications.com
Business Contact:
Dean Massey
PhD
(734) 786-1434
massey@edapplications.com
Research Institution:
n/a
Abstract
This SBIR Phase I project will develop a process for direct synthesis of silane utilizing silicon, hydrogen and a plasma arc. The broader/commercial impact of the project will include the potential elimination of shipping of hazardous silane gas, and decreased production cost for silane gas. Both of these outcomes will have broad impact across the manufacturing of a wide variety of electronic equipment, computing equipment, solar power generation equipment, and other important products.

* information listed above is at the time of submission.

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