Fabrication Process and Electronics Development for Scaling Segmented MEMS DMs

Award Information
Agency: National Aeronautics and Space Administration
Branch: N/A
Contract: NNX13CG28P
Agency Tracking Number: 124583
Amount: $125,000.00
Phase: Phase I
Program: SBIR
Awards Year: 2013
Solicitation Year: 2012
Solicitation Topic Code: S2.01
Solicitation Number: N/A
Small Business Information
CA, Berkeley, CA, 94704-1717
DUNS: 120364380
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Michael Helmbrecht
 Principal Investigator
 (510) 849-2375
 michael.helmbrecht@irisao.com
Business Contact
 Michael Helmbrecht
Title: Business Official
Phone: (510) 849-2375
Email: michael.helmbrecht@irisao.com
Research Institution
 Stub
Abstract
Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with more than 10^4 actuators that have size, weight, and power specifications that are far lower than conventional piezoelectric and electrostrictive DMs. However, considerable development is necessary to take state-of-the-art DMs today and make them flight-like. This Phase I SBIR proposal addresses two critical areas in MEMS DM development towards the goal of developing flight-like hardware. Namely, Phase I research will further develop Iris AO's proven hybrid MEMS DM technology to: 1) make a critical assembly step in the fabrication process scalable to wafer scales and 2) increase drive electronics resolution to 16 bits while simultaneously reducing power requirements more than three-fold over existing 14-bit resolution electronics. The increased spatial and actuator resolution afforded by the development here will enable picometer resolution DMs required to reach 10^10 contrast levels necessary for direct detection of Earth-sized terrestrial planets.

* Information listed above is at the time of submission. *

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