Fabrication Process and Electronics Development for Scaling Segmented MEMS DMs
National Aeronautics and Space Administration
Agency Tracking Number:
Solicitation Topic Code:
Small Business Information
Iris AO, Inc.
CA, Berkeley, CA, 94704-1717
Socially and Economically Disadvantaged:
AbstractMicroelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with more than 10^4 actuators that have size, weight, and power specifications that are far lower than conventional piezoelectric and electrostrictive DMs. However, considerable development is necessary to take state-of-the-art DMs today and make them flight-like. This Phase I SBIR proposal addresses two critical areas in MEMS DM development towards the goal of developing flight-like hardware. Namely, Phase I research will further develop Iris AO's proven hybrid MEMS DM technology to: 1) make a critical assembly step in the fabrication process scalable to wafer scales and 2) increase drive electronics resolution to 16 bits while simultaneously reducing power requirements more than three-fold over existing 14-bit resolution electronics. The increased spatial and actuator resolution afforded by the development here will enable picometer resolution DMs required to reach 10^10 contrast levels necessary for direct detection of Earth-sized terrestrial planets.
* information listed above is at the time of submission.