High Speed Imaging Spectropolarimeter for Dynamic Samples

Award Information
Agency:
Department of Commerce
Branch
National Institute of Standards and Technology
Amount:
$89,973.00
Award Year:
2013
Program:
SBIR
Phase:
Phase I
Contract:
SB1341-13-SE-0302
Award Id:
n/a
Agency Tracking Number:
025-63-2013
Solicitation Year:
2013
Solicitation Topic Code:
9.02.06.63-R
Solicitation Number:
n/a
Small Business Information
200 Westside Square, Suite 320, Huntsville , AL, 35801-
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
Y
Duns:
129074840
Principal Investigator:
Art Lompado
(256) 562-0087
art.lompado@polarissensor.com
Business Contact:
Research Institution:
n/a
Abstract
Spectroscopic ellipsometry is recognized as the gold standard in noncontact characterization of the refractive index and thickness of a thin optical film or film stack on a substrate. However, it suffers from a number of shortcomings, perhaps the most important of which is the time required to perform a single measurement. Moreover, manufacturers are interested in comprehensive evaluation of thin films over a number of dimensional parameters including time, space, and wavelength, aspirations that cannot be achieved with existing devices. Polaris Sensor Technologies proposes to overcome these shortcomings through the design of an integrated spectroscopic polarimeter capable of performing measurements over all of these dimensions at high repetition rates. The proposed device integrates the established polarimetric architectures of division of aperture, focal plane, and time to yield multiplexed data collection method that simultaneously characterizes samples across all relevant dimensions. A unique sensor calibration procedure is proposed along with a strategy to apply this procedure for highly accurate thin film characterizations. This approach in conjunction with proposed dedicated data processing hardware, promises to overcome current ellipsometric limitations and open up the technique to larger application spaces, including the rapidly developing markets of thin film process control.

* information listed above is at the time of submission.

Agency Micro-sites


SBA logo

Department of Agriculture logo

Department of Commerce logo

Department of Defense logo

Department of Education logo

Department of Energy logo

Department of Health and Human Services logo

Department of Homeland Security logo

Department of Transportation logo

Enviromental Protection Agency logo

National Aeronautics and Space Administration logo

National Science Foundation logo
US Flag An Official Website of the United States Government