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Digital Micromirror Device Detection Scheme for Transmission Scanning Electron Microscopy

Award Information
Agency: Department of Commerce
Branch: National Institute of Standards and Technology
Contract: SB1341-14-CN-0026
Agency Tracking Number: 022-63-2014
Amount: $300,000.00
Phase: Phase II
Program: SBIR
Solicitation Topic Code: N/A
Solicitation Number: N/A
Solicitation Year: N/A
Award Year: 2014
Award Start Date (Proposal Award Date): N/A
Award End Date (Contract End Date): N/A
Small Business Information
1717 Stewart St.
Santa Monica, CA 90404-
United States
DUNS: 140789137
HUBZone Owned: No
Woman Owned: No
Socially and Economically Disadvantaged: No
Principal Investigator
 Bryce Jacobson
 (310) 822-5845
Business Contact
 Salime Boucher
Research Institution

Accurate quantitative characterization of materials is crucial for a wide range of industrial and research applications. New transmission scanning electron microscopy (t-SEM) methods have the potential for high-resolution imaging similar to transmission electron microscopy (TEM) with a less expensive, more widely available SEM system. In Phase I, RadiaBeam Technologies demonstrated the feasibility of a novel t-SEM detection scheme based on digital micromirror device technology. In Phase II, a prototype detector will be developed and integrated into a standard SEM system. Its synchronization with the scanning beam, as well as its ability to perform transmission electron diffraction imaging, dark-field imaging, and angular selection will be demonstrated and characterized.

* Information listed above is at the time of submission. *

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