Atomic Layer Deposition of PbZrxTi1-xO3 Thin Films for PiezoMEMS Applications

In this STTR program, Structured Materials Industries, Inc. (SMI) and partners will develop hardware and process technology to deposit uniform films of piezoelectric PbZrxTi1-xO3, on substrates with complex 3-dimensional topography. Piezoelectric PbZrxTi1-xO3 films are a critical technology for advanced Micro Electro Mechanical System (MEMS), to provide low power actuation in nanoscale devices. Our technical approach is based on atomic layer deposition (ALD), which can achieve the required uniform film deposition over the extreme topography of advanced MEMS. The successful conclusion of this work will enable the development of micro robotic devices, for future biomedical, imaging and communication applications.