DEVELOPMENT OF A DEEP ULTRAVIOLET PELLICLE FOR SUBMICRON I.C. LITHOGRAPHY

Award Information
Agency:
Department of Defense
Branch
Defense Advanced Research Projects Agency
Amount:
$50,000.00
Award Year:
1990
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Agency Tracking Number:
12145
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Act Inc
B.f.t.c. South Mountain Dr, Bethlehem, PA, 18015
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Dr Irl E Ward
(215) 861-6921
Business Contact:
() -
Research Institution:
n/a
Abstract
N/A

* information listed above is at the time of submission.

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