Non-Destructive Real-Time In-Situ Analysis of Vacuum Grown and Processed Infrared Material and Sensor Arrays

Award Information
Agency:
Department of Defense
Branch
Army
Amount:
$100,000.00
Award Year:
1997
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Award Id:
36876
Agency Tracking Number:
36876
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
5342 Hickory Trail Lane, Blue Ash, OH, 45242
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Douglas G. Frank
(513) 791-0104
Business Contact:
() -
Research Institute:
n/a
Abstract
The objective of the proposed project is to develop innovative new analytical instrumentation and methodology capable of performing fully automated, non-destructive analysis of semiconductor sensor elements and arrays locate on three inch diameter wafers. The instrumentation would be capable of analyzing II-VI compounds and alloys, particularly HgCdTe. The methodology would employ state-of-the-art electron optics and signal processing electronics to maximize instrument resolution and throughput while minimizing damage due to the incident electron beam. The proposed project has been divided into two Phases. Phase I consists primarily of a research phase in which the overall system requirements would be investigated and formalized, and a construction phase during which the basic system. components would be designed and constructed. During Phase II, the remaining components (primarily analytical) would be constructed and installed, yielding an instrument which is fully integrated and automatic. It is therefore important that a thorough and detailed design be completed during the Phase I effort, to allow straightforward addition of components during Phase II. All manufacturers of microcircuitry should find this technology to be highly useful for their research and development efforts when interfaced with their manufacturing systems. Researchers in materials science and surface analysis should also find the equipment and methodology developed in this project useful, as it will represent the state of the art

* information listed above is at the time of submission.

Agency Micro-sites


SBA logo

Department of Agriculture logo

Department of Commerce logo

Department of Defense logo

Department of Education logo

Department of Energy logo

Department of Health and Human Services logo

Department of Homeland Security logo

Department of Transportation logo

Enviromental Protection Agency logo

National Aeronautics and Space Administration logo

National Science Foundation logo
US Flag An Official Website of the United States Government