THE CONSTRUCTION OF A SOFT X-RAY SOURCE USING TRANSITION RADIATION FOR LITHOGRAPHY

Award Information
Agency:
Department of Energy
Branch
n/a
Amount:
$479,000.00
Award Year:
1986
Program:
SBIR
Phase:
Phase II
Contract:
n/a
Agency Tracking Number:
2481
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Adelphi Technology Inc.
285 Hamilton, Suite 430, Woodside, CA, 94062
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Dr. Melvin A. Piestrup
Prinicipal Investigator
(415) 851-0633
Business Contact:
() -
Research Institution:
n/a
Abstract
THE OBJECTIVE OF THIS PROJECT IS TO DEVELOP TRANSITION RADIATORS WITH HIGH AVERAGE PHOTON FLUX AND TO USE THEM AS X-RAY SOURCES FOR SCIENTIFIC AND TECHNOLOGICAL RESEARCH. IN PARTICULAR, THE COMPANY WILL STUDY THE USE OF THESE SOURCES FOR X-RAY LITHOGRAPHY FOR THE PRO- DUCTION OF INTEGRATED CIRCUITS. USING A NEWLY-DEVEL- OPED HIGH-AVERAGE-CURRENT, 50 MEV ACCELERATOR, THE TOTAL PHOTON FLUX FROM SEVERAL FOIL STACKS WILL BE MEASURED. THE RADIATORS WILL BE TESTED AT FULL BEAM CURRENT FOR MAXIMUM FLUX AND TARGET LIFETIME. SUCH A HIGH-BRIGHTNESS SOURCE COULD BE USED TO PRODUCE IN- TEGRATED CIRCUITS WITH CIRCUIT ELEMENTS OF SUBMICRON GEOMETRIES.

* information listed above is at the time of submission.

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