THE CONSTRUCTION OF A SOFT X-RAY SOURCE USING TRANSITION RADIATION FOR LITHOGRAPHY

Award Information
Agency: Department of Energy
Branch: N/A
Contract: N/A
Agency Tracking Number: 2481
Amount: $479,000.00
Phase: Phase II
Program: SBIR
Awards Year: 1986
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
285 Hamilton, Suite 430, Woodside, CA, 94062
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Dr. Melvin A. Piestrup
 Prinicipal Investigator
 (415) 851-0633
Business Contact
Phone: () -
Research Institution
N/A
Abstract
THE OBJECTIVE OF THIS PROJECT IS TO DEVELOP TRANSITION RADIATORS WITH HIGH AVERAGE PHOTON FLUX AND TO USE THEM AS X-RAY SOURCES FOR SCIENTIFIC AND TECHNOLOGICAL RESEARCH. IN PARTICULAR, THE COMPANY WILL STUDY THE USE OF THESE SOURCES FOR X-RAY LITHOGRAPHY FOR THE PRO- DUCTION OF INTEGRATED CIRCUITS. USING A NEWLY-DEVEL- OPED HIGH-AVERAGE-CURRENT, 50 MEV ACCELERATOR, THE TOTAL PHOTON FLUX FROM SEVERAL FOIL STACKS WILL BE MEASURED. THE RADIATORS WILL BE TESTED AT FULL BEAM CURRENT FOR MAXIMUM FLUX AND TARGET LIFETIME. SUCH A HIGH-BRIGHTNESS SOURCE COULD BE USED TO PRODUCE IN- TEGRATED CIRCUITS WITH CIRCUIT ELEMENTS OF SUBMICRON GEOMETRIES.

* Information listed above is at the time of submission. *

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