A COLLIMATED X-RAY LITHOGRAPHY SOURCE USING A KUMAKHOV LENS

Award Information
Agency:
National Science Foundation
Branch
n/a
Amount:
$299,983.00
Award Year:
1995
Program:
SBIR
Phase:
Phase II
Contract:
n/a
Award Id:
17249
Agency Tracking Number:
17249
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
285 Hamilton Ave, Suite 430, Palo Alto, CA, 94301
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Dr Melvin A Piestrup
() -
Business Contact:
(415) 328-7337
Research Institute:
n/a
Abstract
THE PURPOSE OF THE PROPOSED WORK IS TO DESIGN X-RAY OPTICS FOR THE COLLECTION AND REDISTRIBUTION OF THE ANNULAR X-RAY CONE GENERATED BY TRANSITION RADIATION SUCH THAT A UNIFORM X-RAY SPOT IS DELIVERED AT HIGH POWER DENSITY TO A MASK/WAFER TARGET. THIS WILL INCREASE THE POWER DENSITY FROM THE EXISTING 1 MW/CM(2) TO 5 MW/CM(2) PERMITTING TRANSITION RADIATION TO BE A COMPETITIVE SOURCE FOR X-RAY LITHOGRAPHY. TRANSITION RADIATION IS EMITTED IN CONICAL ANNULUS WHICH HAS A CENTRAL HOLE IN THE RADIATION PATTERN AND MORE THAN HALF OF THE X-RAYS ARE EMITTED AT ANGLES LARGER THAN THE ANGLE OF PEAK INTENSITY. HENCE, EFFICIENT COLLECTION OF THE X-RAYS AND THEIR PROPER COLLIMATION INTO AUNIFORM BEAM AREA ON THE SIZE OF THE MASK AND WAFER TARGET AREAS ARE REQUIRED FOR UNIFORM EXPOSURE OF X-RAY PHOTORESISTIN THE PROCESS OF MICROINTEGRATED CIRCUIT PRODUCTION. UNDER THE PROPOSED PROGRAM WE WILL DEMONSTRATE FEASIBILITY OF USING KUMA-KHOV X-RAY OPTICS TO COLLECT AND COLLIMATE X-RAYS FROM A TRANSITION RADIATION SOURCE OVER A ANGULAR RANGE OF UP TO 30 MRAD AND TO PROVIDE A QUASIPARALLEL BEAM SUITABLE OF X-RAY LITHOGRAPHY. THE DESIRED INTENSITY UNIFORMITY ACROSS THE OUTPUT X-RAY BEAM IS3%. A COMPLETE DESIGN OF A KUMAKHOV LENS BASED ON COMPUTER SIMULATION AND ON EXPERIMENTAL RESULTS WITH SINGLE CAPILLARIES AND POLYCAPILLARIES AND THEIR CORRELATION WITH THEORETICAL PREDICTIONS WILL BE DONE.

* information listed above is at the time of submission.

Agency Micro-sites


SBA logo

Department of Agriculture logo

Department of Commerce logo

Department of Defense logo

Department of Education logo

Department of Energy logo

Department of Health and Human Services logo

Department of Homeland Security logo

Department of Transportation logo

Enviromental Protection Agency logo

National Aeronautics and Space Administration logo

National Science Foundation logo
US Flag An Official Website of the United States Government