A COLLIMATED X-RAY LITHOGRAPHY SOURCE USING A KUMAKHOV LENS

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: N/A
Agency Tracking Number: 17249
Amount: $299,983.00
Phase: Phase II
Program: SBIR
Awards Year: 1995
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
Adelphi Technology Inc.
285 Hamilton Ave, Suite 430, Palo Alto, CA, 94301
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Dr Melvin A Piestrup
 () -
Business Contact
Phone: (415) 328-7337
Research Institution
N/A
Abstract
THE PURPOSE OF THE PROPOSED WORK IS TO DESIGN X-RAY OPTICS FOR THE COLLECTION AND REDISTRIBUTION OF THE ANNULAR X-RAY CONE GENERATED BY TRANSITION RADIATION SUCH THAT A UNIFORM X-RAY SPOT IS DELIVERED AT HIGH POWER DENSITY TO A MASK/WAFER TARGET. THIS WILL INCREASE THE POWER DENSITY FROM THE EXISTING 1 MW/CM(2) TO 5 MW/CM(2) PERMITTING TRANSITION RADIATION TO BE A COMPETITIVE SOURCE FOR X-RAY LITHOGRAPHY. TRANSITION RADIATION IS EMITTED IN CONICAL ANNULUS WHICH HAS A CENTRAL HOLE IN THE RADIATION PATTERN AND MORE THAN HALF OF THE X-RAYS ARE EMITTED AT ANGLES LARGER THAN THE ANGLE OF PEAK INTENSITY. HENCE, EFFICIENT COLLECTION OF THE X-RAYS AND THEIR PROPER COLLIMATION INTO AUNIFORM BEAM AREA ON THE SIZE OF THE MASK AND WAFER TARGET AREAS ARE REQUIRED FOR UNIFORM EXPOSURE OF X-RAY PHOTORESISTIN THE PROCESS OF MICROINTEGRATED CIRCUIT PRODUCTION. UNDER THE PROPOSED PROGRAM WE WILL DEMONSTRATE FEASIBILITY OF USING KUMA-KHOV X-RAY OPTICS TO COLLECT AND COLLIMATE X-RAYS FROM A TRANSITION RADIATION SOURCE OVER A ANGULAR RANGE OF UP TO 30 MRAD AND TO PROVIDE A QUASIPARALLEL BEAM SUITABLE OF X-RAY LITHOGRAPHY. THE DESIRED INTENSITY UNIFORMITY ACROSS THE OUTPUT X-RAY BEAM IS3%. A COMPLETE DESIGN OF A KUMAKHOV LENS BASED ON COMPUTER SIMULATION AND ON EXPERIMENTAL RESULTS WITH SINGLE CAPILLARIES AND POLYCAPILLARIES AND THEIR CORRELATION WITH THEORETICAL PREDICTIONS WILL BE DONE.

* information listed above is at the time of submission.

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