HIGH CONCENTRATION OZONE PRODUCTION FOR SEMICONDUCTOR MANUFACTURING

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: N/A
Agency Tracking Number: 17248
Amount: $299,972.00
Phase: Phase II
Program: SBIR
Awards Year: 1995
Solitcitation Year: N/A
Solitcitation Topic Code: N/A
Solitcitation Number: N/A
Small Business Information
Adelphi Technology Inc.
285 Hamilton Ave, Suite 430, Palo Alto, CA, 94301
Duns: N/A
Hubzone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Dr. David G. Boyers
 Principal Investigator
 () -
Business Contact
Phone: () -
Research Institution
N/A
Abstract
THE OBJECTIVE OF THIS RESEARCH IS TO EXPLORE THE FEASIBILITY OF DEVELOPING COMPACT, HIGH CONCENTRATION, OZONEGENERATION EQUIPMENT FOR THE DEMANDING REQUIREMENTS OF THE SEMICONDUCTOR MANUFACTURING AND MATERIALS PROCESSING INDUSTRY. EMERGING PROCESSING TECHNOLOGIES USING OZONE CHEMISTRY HAVE GIVEN RISE TO THE NEED FOR SUCH EQUIPMENT. CURRENT GENERATORS ARE INADEQUATE FOR THE TASK AND TOO LARGETO BE INSTALLED IN THE CLEAN ROOM ENVIRONMENT NEXT TO A CVD SYSTEM OR OTHER SEMICONDUCTOR TOOL. CURRENT DOUBLE-COOLED GENERATOR DESIGNS ALSO REQUIRE A DIELECTRIC COOLANT AND A DEDICATED RECIRCULATING OIL COOLING SYSTEM TO REMOVE HEAT FROM THE GENERATOR ELECTRODES. THE EXPERIMENTAL PROGRAM IN PHASE I WILL BE DIRECTED TOWARD ESTABLISHING THE FEASIBILITYOF DEVELOPING A COMPACT GENERATOR MODULE AND EXCITATION SOURCE WITH THE REQUIRED PERFORMANCE. PHASE II WILL BE DIRECTED TOWARD THE CONSTRUCTION OF A FULL SCALE PROTO-TYPE. IF SUCCESSFUL, THIS PROGRAM WILL LEAD TO THE DEVELOPMENT OF A CRITICAL MANUFACTURING RESOURCE FOR USE IN THE FABRICATION OF THE NEXT GENERATION OF SEMICONDUCTOR DEVICES.

* information listed above is at the time of submission.

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