A HIGH INTENSITY EXCIMER UV SOURCE FOR SEMICONDUCTOR MANUFACTURING

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: N/A
Agency Tracking Number: 27456
Amount: $64,996.00
Phase: Phase I
Program: SBIR
Awards Year: 1994
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
Adelphi Technology Inc.
2181 Park Blvd, Palo Alto, CA, 94306
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 David G Boyers
 (415) 328-7337
Business Contact
Phone: () -
Research Institution
N/A
Abstract
THE OBJECTIVE OF THIS RESEARCH IS TO EXPLORE THE FEASIBILITY OF DEVELOPING A HIGH INTENSITY UV EXCIMER SOURCE FOR THE DEMANDING REQUIREMENTS OF THE SEMICONDUCTOR MANUFACTURING AND MATERIALS PROCESSING INDUSTRY. EMERGING PROCESSING TECHNOLOGIES NOT REQUIRING A COHERENT SOURCE INCLUDING UV WAFER CLEANING AND PHOTO CVD WILL REQUIRE VERY HIGH UV INTENSITIES OVER LARGE AREAS (100 MW/CM2) CURRENTLY ONLY AVAILABLE FROM EXCIMER LASERS. CONVENTIONAL UV LAMPS ARE INADEQUATE FOR THE TASK. EXCIMER LASERS CANNOT CONVENIENTLY ILLUMINATE A LARGE FIELD SIZE, ARE OFTEN DIFFICULT TO INTEGRATE INTO A PRODUCTION TOOL, AND HAVE A VERY HIGH COST OF OWNERSHIP. THE RESEARCH WILL BE DIRECTED TOWARD ESTABLISHING THE FEASIBILITY OF DEVELOPING A UV EXCIMER LAMP AND EXCITATION SOURCE WITH THE REQUIRED PERFORMANCE: (1) A LAMP AND EXCITATION SOURCE WILL BE DESIGNED AND FABRICATED; (2) THE SPECTRUM AND UV EFFICIENCY WILL BE MEASURED WITH PURE XE (172 NM); AND (3) A PRELIMINARY FULL SCALE DESIGN AND COST ESTIMATE WILL BE PREPARED.

* information listed above is at the time of submission.

Agency Micro-sites

SBA logo
Department of Agriculture logo
Department of Commerce logo
Department of Defense logo
Department of Education logo
Department of Energy logo
Department of Health and Human Services logo
Department of Homeland Security logo
Department of Transportation logo
Environmental Protection Agency logo
National Aeronautics and Space Administration logo
National Science Foundation logo
US Flag An Official Website of the United States Government