NOVEL PROCESS FOR THE THIN FILM GROWTH OF YBA2CU3O7

Award Information
Agency: National Aeronautics and Space Administration
Branch: N/A
Contract: N/A
Agency Tracking Number: 11901
Amount: $499,941.00
Phase: Phase II
Program: SBIR
Awards Year: 1991
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
520-b Danbury Road, New Milford, CT, 06776
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 James D. Parsons
 Director, Mocvd Research
 (203) 355-2681
Business Contact
 E. G. BANUCCI
Title: PRESIDENT
Phone: (203) 355-2681
Research Institution
N/A
Abstract
REALIZATION OF THE PERFORMANCE ADVANTAGES OF SUPERCONDUCTING DEVICES IN HIGH FREQUENCY COMMUNICATIONS DEPENDS ON DEVELOPMENT OF A LOW TEMPERATURE DEPOSITION PROCESS WITH EXACTING CONTROL OF STOICHIOMETRY AND MORPHOLOGY. MOCVD CAN MEET THESE NEEDS COUPLED WITH EASE OFSCALE-UP. HOWEVER, RECENT WORK AT ADVANCED TECHNOLOGY MATERIALS, INC. SHOWS THAT YBACUO AND BISRCACUO FILMS GROWN BY MOCVD AT TEMPERATURES LESS THAN 800 DEGREES CENTIGRADE ARE AMORPHOUS MIXTURES OF OXIDES, WITH CAULIFLOWER-LIKE MORPHOLOGY INDICATIVE OF LOW SURFACE MOBILITY GROWTH. SURFACE MOBILITIES CAN BE ENHANCED THROUGH THE USE OF A PLASMA. MOREOVER, PLASMA ASSISTED LASER ABLATION, SPUTTERING AND REACTIVE EVAPORATION HAVE ALREADY BEEN UTILIZED FOR THE IN-SITU GROWTH OF SUPERCONDUCTING THIN FILMS AT 400-600 DEGREES CENTIGRADE. AT 600 DEGREES CENTIGRADE, A 50 EV OXYGEN ION BEAM OXIDIZED BAF2 TO BAO, WHICH SUGGESTS THAT PLASMA ENHANCED-CVD WILL EFFECT THE IN-SITU GROWTH OF SUPERCONDUCTING THIN FILMS WITH THE EXISTING REAGENTS AT 600 DEGREES CENTIGRADE OR BELOW. PHASE I WILL DEMONSTRATE THE GROWTH OF IN-SITU SUPERCONDUCTING THIN FILMS BY PECVD. PHASE II WILL FOCUS ONPROCESS OPTIMIZATION THRU THE CORRELATION OF PLASMA PROPERTIES DETERMINED BY IN-SITU DIAGNOSTICS WITH THE HTSC THIN FILM CHARACTERIZATION DATA. THIS WILL ALLOW A PHASE III SCALE-UP OF THE PECVD PROCESS TO MULTIWAFER PRODUCTION.

* Information listed above is at the time of submission. *

Agency Micro-sites

SBA logo
Department of Agriculture logo
Department of Commerce logo
Department of Defense logo
Department of Education logo
Department of Energy logo
Department of Health and Human Services logo
Department of Homeland Security logo
Department of Transportation logo
Environmental Protection Agency logo
National Aeronautics and Space Administration logo
National Science Foundation logo
US Flag An Official Website of the United States Government