ORGANOARSINE REPLACEMENTS FOR ARSINE IN MOCVD

Award Information
Agency: Department of Defense
Branch: Army
Contract: N/A
Agency Tracking Number: 18541
Amount: $50,000.00
Phase: Phase I
Program: SBIR
Awards Year: 1992
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
Advanced Technology
7 Commerce Drive, Danbury, CT, 06810
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Dr. Walter Kosar
 (230) 794-1100
Business Contact
Phone: () -
Research Institution
N/A
Abstract
ORGANOMETALLIC VAPOR PHASE EPITAXY (OMVPE) IS A PROMISING TECHNIQUE FOR PRODUCING ULTRAHIGH PURITY III-V COMPOUND SEMICONDUCTOR. OMVPE CAN PRODUCE COMPLEX LAYERED STRUCTURES WITH THE ABRUPT INTERFACES REQUIRED FOR ADVANCED ELECTRONIC AND PHOTONIC DEVICES. UNFORTUNATELY, OMVPE CURRENTLY REQUIRES EXTREMELY TOXIC AND/OR PYROPHORIC GASES STORED UNDER PRESSURE IN LARGE VOLUMES. THESE GASES REPRESENT SERIOUS THREATS TO SAFETY IN THE WORKPLACE BECAUSE OF THE POSSIBILITY OF WIDESPREAD DISCHARGE OF THE GASES ANS SUBSEQUENT HUMAN EXPOSURE. RECENTLY WE HAVE SHOWN THAT ARSINE FROM AN ON-DEMAND ARSINE GENERATOR YIELDS GAAS AND INGAAS OF QUALITY COMPARABLE TO OR BETTER THAN IS OBTAINED WITH ULTRAHIGH PURITY TANK ARSINE. THE GENERATOR IMPROVES SAFETY BY ELIMINATING LARGE ARSINE INVENTORIES AND PROVIDING A LOW PRESSURE SOURCES. ARSINE IS GENERATOR "JUST-IN-TIME" BY ADDING A LIQUID ACTIVATOR TO A SOLID PRESURSOR AND IS DELIVERED TO THE OMVPE SYSTEM THROUGH A UNIQUE PURIFICATION AND GAS MANAGEMENT SYSTEM. IN PHASE I WE WILL DEMONSTRATE THAT THE ARSINE GENERATION TECHNOLOGY WILL BE DEVELOPED THAT CAN BE USED IN THE CURRENT GENERATOR HARDWARE. THE NEW PHOSPHINE PRECURSOR WILL BE CONVERTED TO PHOSPHINE, WHICH WILL THEN BE PURIFIED, CHEMICALLY ANALYZED AND EVALUATED AS A SOURCE MATERIAL FOR OMPE OF INP AND INGAASP.

* information listed above is at the time of submission.

Agency Micro-sites

SBA logo
Department of Agriculture logo
Department of Commerce logo
Department of Defense logo
Department of Education logo
Department of Energy logo
Department of Health and Human Services logo
Department of Homeland Security logo
Department of Transportation logo
Environmental Protection Agency logo
National Aeronautics and Space Administration logo
National Science Foundation logo
US Flag An Official Website of the United States Government