Electro-Optic PLZT Films for Monolithic Tunable Band-Pass Filters

Award Information
Agency: Department of Defense
Branch: Air Force
Contract: N/A
Agency Tracking Number: 20025
Amount: $52,291.00
Phase: Phase I
Program: SBIR
Awards Year: 1993
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
Advanced Technology Materials
7 Commerce Drive, Danbury, CT, 06810
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Dr. Steve Bilodeau
 (203) 794-1100
Business Contact
Phone: () -
Research Institution
Electrically tunable optical filters have been identified as a critical element in many applications, including imaging and automated target recognition applications. While large electro-optic effects can be engineered in composite structures such as multiple quantum-wells or liquid crystals, SLMs based on ceramic materials in the PbLaZrTiO3 (PLZT) family of compounds show a unique combination of high transparance and large electro-optic effects. However, integration of PLZT ceramics in interference coating designs has been a major obstacle to the commercial acceptance of this approach. ATM has pioneered the use of chemical vapor deposition (CVD) to deposit complex oxide films and we now believe that a significant opportunity exists to utilize CVD to deposit films of PLZT on glass, allowing its integration in tunable bandpass filters. In Phase I, we will deposite thick PLZT films, the electro-optic properties will be optimized and a novel multi-element tunable bandpass filter will be fabricated. In Phase II, we will scale the process to an 8" single wafer commercial CVD system used at ATM for deposition of BaSrTiO3 films for DRAMs and pyroelectric IR detectors, and the deposition process will be optimized for high uniformity PLZT layers needed for 3' diameter tunable bandpass filters.

* information listed above is at the time of submission.

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