COMPUTER CONTROLLED MICROINDENTER SYSTEM
Small Business Information
Advanced Technology Materials
115 Clemson Drive, Oak Ridge, TN, 37830
Fahmy M. Haggag
AbstractIncorporation of cleavage microcracks on otherwise crack free material is a new approach used in the fabrication of some microelectonics devices. This proposal describes the development of a new computer controlled microindenter system for the farication of microcracks on a crystalline substrate. System capabilities will include the introduction of two simultaneous Vickers indentations at precise locations and close proximity, data acquistion of indentation load, penetration depth, and temperatures of the indenter head and the substrate, and the computer control of: 1) postion of the substrate relative to the indenter head, 2) temperature of substrate and indenter head, and 3) the indentation loading rate.
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